ForschungTopical Groups
Structure illumination at the nanoscale

Structure illumination at the nanoscale

Development of structured light illumination platforms using arrays of nano-/µLEDs or lasers and their system integration.


  • Development of structured light illumination platforms using nano- and µLEDs and lasers
  • Integration of these platforms into systems like a super-resolution microscope: separately switchable nanoLEDs in an array allow to control the light at the nanoscale with a spatial precision below the wavelength of light and possibly even below the diffraction limit
  • Support EU projects SMILE/SmartFire


  • Epitaxy of III-nitride based LEDs
  • Processing to nano- and µLEDs and arrays
  • Characterisation of nano light sources
  • Hybride integration of LED chip with CMOS microelectronics
  • System integration (guiding of light on the chip, housing and software)


Chichkov NB, Evlyukhin AB, Chichkov BN. Massive surface-plasmon polaritons. Nanophotonics. 2021 Okt 2;10(14):3777-3778. doi.org/10.1515/nanoph-2021-0293

Chichkov NB, Chichkov BN. On the origin of photon mass, momentum, and energy in a dielectric medium [Invited]. Optical materials express. 2021 Aug;11(8):2722-2729. doi.org/10.1364/OME.436306

Gulkin DN, Popkova AA, Afinogenov BI, Shilkin DA, Kuršelis K, Chichkov BN et al. Mie-driven directional nanocoupler for Bloch surface wave photonic platform. Nanophotonics. 2021 Sep;10(11):2939-2947. doi.org/10.1515/nanoph-2021-0295

Wolter S, Spende H, Gülink J, Hartmann J, Wehmann HH, Waag A et al. Size-dependent electroluminescence and current-voltage measurements of blue ingan/gan µleds down to the submicron scale. Nanomaterials. 2021;11(4). 836. doi.org/10.3390/nano11040836

Bezshlyakh DD, Spende H, Weimann T, Hinze P, Bornemann S, Gülink J et al. Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization. Microsystems and Nanoengineering. 2020 Dez 1;6(1). 88. doi.org/10.1038/s41378-020-00198-y

Evlyukhin AB, Tuz VR, Volkov VS, Chichkov BN. Bianisotropy for light trapping in all-dielectric metasurfaces. Physical Review B. 2020 Mai 13;101(20). 205415. doi.org/10.1103/PhysRevB.101.205415

Evlyukhin AB, Matiushechkina M, Zenin VA, Heurs M, Chichkov B. Lightweight metasurface mirror of silicon nanospheres [Invited]. Optical materials express. 2020 Sep 30;10(10):2706-2716. doi.org/10.1364/OME.409311, doi.org/10.15488/11391

Kaseberg T, Siefke T, Kroker S, Bodermann B. Inverted plasmonic lens design for nanometrology applications. Measurement science and technology. 2020 Jul;31(7). 074013. doi.org/10.1088/1361-6501/ab7e6b

Siefke T, Hurtado CBR, Dickmann J, Dickmann W, Käseberg T, Meyer J et al. Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers. Optics express. 2020 Aug 3;28(16):23122-23132. doi.org/10.1364/OE.396044

Tuniz A, Bickerton O, Diaz FJ, Käsebier T, Kley EB, Kroker S et al. Modular nonlinear hybrid plasmonic circuit. Nature Communications. 2020 Dez 1;11(1). 2413. doi.org/10.1038/s41467-020-16190-z

Weituschat LM, Dickmann W, Guimbao J, Ramos D, Kroker S, Postigo PA. Photonic and thermal modelling of microrings in silicon, diamond and GaN for temperature sensing. Nanomaterials. 2020 Mai;10(5). 934. doi.org/10.3390/nano10050934

Zenin VA, Garcia-Ortiz CE, Evlyukhin AB, Yang Y, Malureanu R, Novikov SM et al. Engineering Nanoparticles with Pure High-Order Multipole Scattering. ACS PHOTONICS. 2020 Feb 28;7(4):1067-1075. doi.org/10.1021/acsphotonics.0c00078

Wasisto HS, Prades JD, Gülink J, Waag A. Beyond solid-state lighting: Miniaturization, hybrid integration, and applications of GaN nano-and micro-LEDs. Applied physics reviews. 2019 Dez 1;6(4). Y. doi.org/10.1063/1.5096322

Involved QF Members
Members Institution Relevant Expertise
Jana Hartmann, LeaderTUBSStructured Illumination at the Nanoscale
Andreas WaagTUBSCoherent Light Field Control; Nanophotonics for Atom and Ion Manipulation; Hybrid integration of GaN LEDs with conductive substrates
Vladislav AgluschewitschTUBSCoherent Light Field Control
Stefanie KrokerPTB / TUBSComplex Coupled High Index Waveguide Arrays ; Photonic Nanomaterials in the Strong Optomechanical Coupling Regime
Markus EtzkornTUBSAdvancing TEM Characterization
Boris ChichkovLUHNanoscale Materials Processing
Stefan WolterTUBSµLEDs, electro-optical characterisation
Georg Jacob SchöttlerTUBSµLEDs, Hybrid Integration
Liam Shelling-NetoTUBSDeep Learning, Nanophotonic systems
Mayra Garcés-SchröderTUBSCoherent Light Field Control
Ernst M. RaselLUHQuantum Gravimeters; Atom-Chip Based Gravimeters and Inertial Sensors
Anastasiia SorokinaTUBSOptical simulations, waveguides, light-outcoupling systems, optics for ion traps quantum computers
Vadim IssakovTUBSIntegrierte Schaltungen, CMOS, Hochfrequenzelektronik, Packaging