ForschungTopical Groups
Structured illumination at the nanoscale

Structured illumination at the nanoscale

Development of structured light illumination platforms using arrays of nano-/µLEDs or lasers and their system integration.


  • Development of structured light illumination platforms using nano- and µLEDs and lasers
  • Integration of these platforms into systems like a super-resolution microscope: separately switchable nanoLEDs in an array allow to control the light at the nanoscale with a spatial precision below the wavelength of light and possibly even below the diffraction limit
  • Support EU projects SMILE/SmartFire


  • Epitaxy of III-nitride based LEDs
  • Processing to nano- and µLEDs and arrays
  • Characterisation of nano light sources
  • Hybride integration of LED chip with CMOS microelectronics
  • System integration (guiding of light on the chip, housing and software)


Zeige Ergebnisse 1 - 20 von 24
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Bondza S, Lisdat C, Kroker S, Leopold T. Two-Color Grating Magneto-Optical Trap for Narrow-Line Laser Cooling. Physical review applied. 2022 Apr 1;17(4). 044002.


Käseberg T, Grundmann J, Siefke T, Klapetek P, Valtr M, Kroker S et al. Mueller Matrix Ellipsometric Approach on the Imaging of Sub-Wavelength Nanostructures. Frontiers in Physics. 2022 Jan 21;9. 814559.


Manglano Clavero I, Margenfeld C, Quatuor J, Spende H, Peters L, Schwarz UT et al. Gradients in Three-Dimensional Core–Shell GaN/InGaN Structures: Optimization and Physical Limitations. ACS Applied Materials Interfaces. 2022 Feb 23;14(7):9272–9280.


Neto LS, Dickmann J, Kroker S. Deep learning assisted design of high reflectivity metamirrors. Optics express. 2022 Jan 3;30(2):986-994.


Spende H, Margenfeld C, Waag A. AlGaN Microfins as Nonpolar UV Emitters Probed by Time-Resolved Cathodoluminescence. ACS PHOTONICS. 2022 Apr 13.


Bornemann S, Gulink J, Moro V, Gil JC, Wolter S, Schottler G et al. Processing and characterization of monolithic passive-matrix GaN-based MicroLED arrays with pixel sizes from 5 to 50 μm. IEEE photonics journal. 2021 Aug 20;13(5). 8200209 .


Chichkov NB, Evlyukhin AB, Chichkov BN. Massive surface-plasmon polaritons. Nanophotonics. 2021 Okt 2;10(14):3777-3778.


Chichkov NB, Chichkov BN. On the origin of photon mass, momentum, and energy in a dielectric medium [Invited]. Optical materials express. 2021 Aug;11(8):2722-2729.


Gulkin DN, Popkova AA, Afinogenov BI, Shilkin DA, Kuršelis K, Chichkov BN et al. Mie-driven directional nanocoupler for Bloch surface wave photonic platform. Nanophotonics. 2021 Sep;10(11):2939-2947.


Wolter S, Spende H, Gülink J, Hartmann J, Wehmann HH, Waag A et al. Size-dependent electroluminescence and current-voltage measurements of blue ingan/gan µleds down to the submicron scale. Nanomaterials. 2021;11(4). 836.


Yulianto N, Kadja GTM, Bornemann S, Gahlawat S, Majid N, Triyana K et al. Ultrashort Pulse Laser Lift-Off Processing of InGaN/GaN Light-Emitting Diode Chips. ACS Applied Electronic Materials. 2021 Feb 23;3(2):778-788.


Yulianto N, Refino AD, Syring A, Majid N, Mariana S, Schnell P et al. Wafer-scale transfer route for top–down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique. Microsystems and Nanoengineering. 2021 Dez;7(1). 32.


Bezshlyakh DD, Spende H, Weimann T, Hinze P, Bornemann S, Gülink J et al. Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization. Microsystems and Nanoengineering. 2020 Dez 1;6(1). 88.


Evlyukhin AB, Tuz VR, Volkov VS, Chichkov BN. Bianisotropy for light trapping in all-dielectric metasurfaces. Physical Review B. 2020 Mai 13;101(20). 205415.


Evlyukhin AB, Matiushechkina M, Zenin VA, Heurs M, Chichkov B. Lightweight metasurface mirror of silicon nanospheres [Invited]. Optical materials express. 2020 Sep 30;10(10):2706-2716.




Kaseberg T, Siefke T, Kroker S, Bodermann B. Inverted plasmonic lens design for nanometrology applications. Measurement science and technology. 2020 Jul;31(7). 074013.


Krieg L, Meierhofer F, Gorny S, Leis S, Splith D, Zhang Z et al. Toward three-dimensional hybrid inorganic/organic optoelectronics based on GaN/oCVD-PEDOT structures. Nature Communications. 2020 Dez 1;11(1). 5092.


Siefke T, Hurtado CBR, Dickmann J, Dickmann W, Käseberg T, Meyer J et al. Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers. Optics express. 2020 Aug 3;28(16):23122-23132.


Spende H, Margenfeld C, Meyer T, Clavero IM, Bremers H, Hangleiter A et al. Plasma profiling time-of-flight mass spectrometry for fast elemental analysis of semiconductor structures with depth resolution in the nanometer range. Semiconductor Science and Technology. 2020;35(3). 035006.


Tillner N, Frankerl C, Nippert F, Davies MJ, Brandl C, Lösing R et al. Point Defect-Induced UV-C Absorption in Aluminum Nitride Epitaxial Layers Grown on Sapphire Substrates by Metal-Organic Chemical Vapor Deposition. Physica Status Solidi (B) Basic Research. 2020 Dez;257(12). 2000278.


Involved QF Members
Members Institution Relevant Expertise
Jana Hartmann, LeaderTUBSStructured Illumination at the Nanoscale
Andreas WaagTUBSCoherent Light Field Control; Nanophotonics for Atom and Ion Manipulation; Hybrid integration of GaN LEDs with conductive substrates
Vladislav AgluschewitschTUBSCoherent Light Field Control
Stefanie KrokerPTB / TUBSComplex Coupled High Index Waveguide Arrays ; Photonic Nanomaterials in the Strong Optomechanical Coupling Regime
Markus EtzkornTUBSAdvancing TEM Characterization
Boris ChichkovLUHNanoscale Materials Processing
Stefan WolterTUBSµLEDs, electro-optical characterisation
Georg Jacob SchöttlerTUBSµLEDs, Hybrid Integration
Liam Shelling-NetoTUBSDeep Learning, Nanophotonic systems
Mayra Garcés-SchröderTUBSProcessing of optical components in the µm scale
Ernst M. RaselLUHQuantum Gravimeters; Atom-Chip Based Gravimeters and Inertial Sensors
Anastasiia SorokinaTUBSOptical simulations, waveguides, light-outcoupling systems, optics for ion traps quantum computers
Vadim IssakovTUBSIntegrierte Schaltungen, CMOS, Hochfrequenzelektronik, Packaging
Carl GrimpePTBPhotonic Integrated Circuits
Guochun DuPTBPhotonic Integrated Circuits
Markus Kromrey PTBPhotonic Integrated Circuits
Arstan BisianovTUBSDesign of optical components
Frederik LüssmannTUBSVCSEL development
Robert KraneisTUBSNeuromorphic computing
Julian KassmannTUBSDFB laser development
Maximilian MüllerTUBSSuperresolution microscopy
Maximilian Vergin TUBSHybrid Integration for optical components
Florian MeierhoferTUBSHybrid Integration for optical components
Steffen SauerTUBSPhotonic Integrated Circuits