A compact high-precision periodic-error-free heterodyne interferometer

authored by: Ki Nam Joo, Erin Clark, Yanqi Zhang, Jonathan D. Ellis, Felipe Guzman
Abstract: We present the design, bench-top setup, and experimental results of a compact heterodyne interferometer that achieves picometer-level displacement sensitivities in air over frequencies above 100 MHz. The optical configuration with spatially separated beams prevents frequency and polarization mixing, and therefore eliminates periodic errors. The interferometer is designed to maximize common-mode optical laser beam paths to obtain high rejection of environmental disturbances, such as temperature fluctuations and acoustics. The results of our experiments demonstrate the short- and long-term stabilities of the system during stationary and dynamic measurements. In addition, we provide measurements that compare our interferometer prototype with a commercial system, verifying our higher sensitivity of 3 pm, higher thermal stability by a factor of two, and periodic-error-free performance.
External Organisation(s): University of Arizona
Chosun University
Clerio Vision Inc.
Type: Article
Journal: Journal of the Optical Society of America A: Optics and Image Science, and Vision
Volume: 37
Pages: B11-B18
ISSN: 1084-7529
Publication date: 09.2020
Publication status: Published
Peer reviewed: Yes
ASJC Scopus subject areas: Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Computer Vision and Pattern Recognition
Electronic version(s): https://doi.org/10.1364/JOSAA.396298 (Access: Open)

BibTeX

@article{4631fb03f9dc44c2bd355e6b9f796e52,
title = "A compact high-precision periodic-error-free heterodyne interferometer",
abstract = "We present the design, bench-top setup, and experimental results of a compact heterodyne interferometer that achieves picometer-level displacement sensitivities in air over frequencies above 100 MHz. The optical configuration with spatially separated beams prevents frequency and polarization mixing, and therefore eliminates periodic errors. The interferometer is designed to maximize common-mode optical laser beam paths to obtain high rejection of environmental disturbances, such as temperature fluctuations and acoustics. The results of our experiments demonstrate the short- and long-term stabilities of the system during stationary and dynamic measurements. In addition, we provide measurements that compare our interferometer prototype with a commercial system, verifying our higher sensitivity of 3 pm, higher thermal stability by a factor of two, and periodic-error-free performance.",
author = "Joo, {Ki Nam} and Erin Clark and Yanqi Zhang and Ellis, {Jonathan D.} and Felipe Guzman",
note = "Funding information: National Science Foundation (PHY-1912106).",
year = "2020",
month = sep,
doi = "10.1364/JOSAA.396298",
language = "English",
volume = "37",
pages = "B11--B18",
journal = "Journal of the Optical Society of America A: Optics and Image Science, and Vision",
issn = "1084-7529",
publisher = "OSA - The Optical Society",
number = "9",
}