Processing and characterization of monolithic passive-matrix GaN-based MicroLED arrays with pixel sizes from 5 to 50 μm

authored by
Steffen Bornemann, Jan Gulink, Victor Moro, Joan Canals Gil, Stefan Wolter, Georg Schottler, Daria Bezshlyakh, Joan Daniel Prades, Angel Dieguez, Andreas Waag
Abstract

MicroLED arrays with the capability of switching each pixel separately with high frequency can serve as structured micro-illumination light engines for applications in sensing, optogenetics, microscopy and many others. We describe a scalable chip process chain for the fabrication of passive-matrix microLED arrays, which were integrated with PCB-based driving electronics. The arrays were produced by deep-etching of conventional planar LED structures on sapphire, followed by filling and planarization steps. The pixel resolution lies in the range of 254 to 2540 pixels-per-inch (ppi), the arrays consist of 32 x 32 pixels. Optical output powers up to 50 μW per pixel were measured. In comparison to CMOS-based approaches, the presented technology is a simplified strategy to produce microLED arrays with high pixel counts.

External Organisation(s)
Technische Universität Braunschweig
Universitat de Barcelona
Type
Article
Journal
IEEE photonics journal
Volume
13
ISSN
1943-0655
Publication date
20.08.2021
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
Electronic version(s)
https://doi.org/10.1109/JPHOT.2021.3106584 (Access: Open)