Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers

authored by
Thomas Siefke, Carol B.Rojas Hurtado, Johannes Dickmann, Walter Dickmann, Tim Käseberg, Jan Meyer, Sven Burger, Uwe Zeitner, Bernd Bodermann, Stefanie Kroker
Abstract

We demonstrate the retrieval of deep subwavelength structural information in nanooptical polarizers by scatterometry of quasi-bound states in the continuum (quasi-BICs). To this end, we investigate titanium dioxide wire grid polarizers for application wavelengths in the deep ultraviolet (DUV) spectral range fabricated with a self-aligned double-patterning process. In contrast to the time-consuming and elaborate measurement techniques like scanning electron microscopy, asymmetry induced quasi-BICs occurring in the near ultraviolet and visible spectral range provide an easily accessible and efficient probe mechanism. Thereby, dimensional parameters are retrieved with uncertainties in the sub-nanometer range. Our results show that BICs are a promising tool for process control in optics and semiconductor technology.

External Organisation(s)
National Metrology Institute of Germany (PTB)
Friedrich Schiller University Jena
Technische Universität Braunschweig
Zuse Institute Berlin (ZIB)
Fraunhofer Institute for Applied Optics and Precision Engineering (IOF)
Type
Article
Journal
Optics express
Volume
28
Pages
23122-23132
No. of pages
11
ISSN
1094-4087
Publication date
03.08.2020
Publication status
Published
Peer reviewed
Yes
ASJC Scopus subject areas
Atomic and Molecular Physics, and Optics
Electronic version(s)
https://doi.org/10.1364/OE.396044 (Access: Open)