Novel optical characterization and measurement methods with unprecedented spatial resolution, reliability, and application range are being developed and investigated with the aim of significantly exceeding the fundamental limits of existing optical measurement methods. The aim of the PhD project is to investigate and develop novel marker-free super-resolution microscopy (SRM) techniques for metrological applications on nanoscale engineering structures and surfaces. Different approaches will be investigated to make SRM methods, so far mainly known from fluorescence microscopy, such as structured illumination microscopy (SIM) or pump-probe methods, usable for universal also technical applications and to exploit the potential for reliable optical nanometrology. The activities are embedded in the dynamic environment of various collaborative projects, such as the Cluster of Excellence QuantumFrontiers, the Research Training Group NanoMet, and the EMPIR project PoLight.
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