Structured Illumination at the Nanoscale

Development of structured light illumination platforms using arrays of nano-/µLEDs or lasers and their system integration.

Contributions to QuantumFrontiers

  • Development of nanolight (e.g. µLEDs, laser diodes) for the control of electromagnetic fields at the nanoscale and demonstration of controlling light fields with a precision of 5 nm
  • Design and fabrication of vertical emitting lasers like VCSELs with advanced coherence control, particularly in the UV/blue spectral region 
  • Development of hybrid photonic-plasmonic waveguides for nanoscale light focusing as a potential platform for the manipulation of quantum systems
  • Integration of structured light illumination platforms into systems like a super-resolution microscope or atom and ion chip traps, whereby separately switchable nanoLEDs in an array allow control of the light at the nanoscale with a spatial precision below the wavelength of light and possibly even below the diffraction limit
  • Demonstrating proof-of-principle high-TRL systems based on µLED technology, which have high market potential and motivate spin-off companies

Collaborative Innovation

  • Simulation and fabrication of High Contrast Gratings for VCSELs (Kroker, Waag TU Braunschweig)
  • TEM characterisation of epitaxial material for nano light sources (Etzkorn, Waag TUBS)
  • Electron beam lithography for photonic crystals and high contrast gratings (Siegner PTB, Kroker, Waag TUBS)
  • Integration of µLED and laser arrays with CMOS to control large arrays with high density and small pixel sizes and pitches (Issakov, Waag TU Braunschweig)
  • Integration of laser diodes and integrated photonic circuits (PICs) for controlling light on a chip (Waag, Kroker TUBS, Mehlstäubler PTB)
  • Development of tunable and active metasurfaces for control of EM energy at the nanoscale (Kroker TUBS)
  • Laser printing of nanoparticles for the realization of novel micro-optomechanical devices (Chichkov LUH)

Scientific Output

  • Publications
    Manglano Clavero I, Margenfeld C, Hartmann J, Waag A. Facet Control and Material Redistribution in GaN Growth on Three-Dimensional Structures. Crystal Growth and Design. 2023 Jan 4;23(1):263-272. Epub 2022 Dez 22. doi: 10.1021/acs.cgd.2c00989
    Bondza S, Lisdat C, Kroker S, Leopold T. Two-Color Grating Magneto-Optical Trap for Narrow-Line Laser Cooling. Physical review applied. 2022 Apr 1;17(4):044002. doi: 10.1103/physrevapplied.17.044002
    Käseberg T, Grundmann J, Siefke T, Klapetek P, Valtr M, Kroker S et al. Mueller Matrix Ellipsometric Approach on the Imaging of Sub-Wavelength Nanostructures. Frontiers in Physics. 2022 Jan 21;9:814559. doi: 10.3389/fphy.2021.814559
    Manglano Clavero I, Margenfeld C, Quatuor J, Spende H, Peters L, Schwarz UT et al. Gradients in Three-Dimensional Core–Shell GaN/InGaN Structures: Optimization and Physical Limitations. ACS Applied Materials Interfaces. 2022 Feb 23;14(7):9272–9280. Epub 2022 Feb 9. doi: 10.1021/acsami.1c19490
    Neto LS, Dickmann J, Kroker S. Deep learning assisted design of high reflectivity metamirrors. Optics express. 2022 Jan 3;30(2):986-994. doi: 10.1364/OE.446442
    Spende H, Margenfeld C, Waag A. AlGaN Microfins as Nonpolar UV Emitters Probed by Time-Resolved Cathodoluminescence. ACS PHOTONICS. 2022 Mai 18;9(5):1594-1604. Epub 2022 Apr 13. doi: 10.1021/acsphotonics.1c01794
    Bornemann S, Gulink J, Moro V, Gil JC, Wolter S, Schottler G et al. Processing and characterization of monolithic passive-matrix GaN-based MicroLED arrays with pixel sizes from 5 to 50 μm. IEEE photonics journal. 2021 Aug 20;13(5):8200209 . doi: 10.1109/JPHOT.2021.3106584
    Chichkov NB, Evlyukhin AB, Chichkov BN. Massive surface-plasmon polaritons. Nanophotonics. 2021 Okt 2;10(14):3777-3778. Epub 2021 Sep 9. doi: 10.1515/nanoph-2021-0293
    Chichkov NB, Chichkov BN. On the origin of photon mass, momentum, and energy in a dielectric medium [Invited]. Optical materials express. 2021 Aug;11(8):2722-2729. Epub 2021 Jul 27. doi: 10.1364/OME.436306
    Gulkin DN, Popkova AA, Afinogenov BI, Shilkin DA, Kuršelis K, Chichkov BN et al. Mie-driven directional nanocoupler for Bloch surface wave photonic platform. Nanophotonics. 2021 Sep;10(11):2939-2947. Epub 2021 Aug 16. doi: 10.1515/nanoph-2021-0295
    Wolter S, Spende H, Gülink J, Hartmann J, Wehmann HH, Waag A et al. Size-dependent electroluminescence and current-voltage measurements of blue ingan/gan µleds down to the submicron scale. Nanomaterials. 2021;11(4):836. doi: 10.3390/nano11040836
    Yulianto N, Kadja GTM, Bornemann S, Gahlawat S, Majid N, Triyana K et al. Ultrashort Pulse Laser Lift-Off Processing of InGaN/GaN Light-Emitting Diode Chips. ACS Applied Electronic Materials. 2021 Feb 23;3(2):778-788. doi: 10.1021/acsaelm.0c00913
    Yulianto N, Refino AD, Syring A, Majid N, Mariana S, Schnell P et al. Wafer-scale transfer route for top–down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique. Microsystems and Nanoengineering. 2021 Dez;7(1):32. doi: 10.1038/s41378-021-00257-y
    Bezshlyakh DD, Spende H, Weimann T, Hinze P, Bornemann S, Gülink J et al. Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization. Microsystems and Nanoengineering. 2020 Dez 1;6(1):88. doi: 10.1038/s41378-020-00198-y
    Evlyukhin AB, Tuz VR, Volkov VS, Chichkov BN. Bianisotropy for light trapping in all-dielectric metasurfaces. Physical Review B. 2020 Mai 13;101(20):205415. doi: 10.1103/PhysRevB.101.205415
    Evlyukhin AB, Matiushechkina M, Zenin VA, Heurs M, Chichkov B. Lightweight metasurface mirror of silicon nanospheres [Invited]. Optical materials express. 2020 Sep 30;10(10):2706-2716. doi: 10.1364/OME.409311, 10.15488/11391
    Kaseberg T, Siefke T, Kroker S, Bodermann B. Inverted plasmonic lens design for nanometrology applications. Measurement science and technology. 2020 Jul;31(7):074013. doi: 10.1088/1361-6501/ab7e6b
    Krieg L, Meierhofer F, Gorny S, Leis S, Splith D, Zhang Z et al. Toward three-dimensional hybrid inorganic/organic optoelectronics based on GaN/oCVD-PEDOT structures. Nature Communications. 2020 Dez 1;11(1):5092. doi: 10.1038/s41467-020-18914-7
    Siefke T, Hurtado CBR, Dickmann J, Dickmann W, Käseberg T, Meyer J et al. Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers. Optics express. 2020 Aug 3;28(16):23122-23132. Epub 2020 Jul 20. doi: 10.1364/OE.396044
    Spende H, Margenfeld C, Meyer T, Clavero IM, Bremers H, Hangleiter A et al. Plasma profiling time-of-flight mass spectrometry for fast elemental analysis of semiconductor structures with depth resolution in the nanometer range. Semiconductor Science and Technology. 2020;35(3):035006. doi: 10.1088/1361-6641/ab6ac0
    Tillner N, Frankerl C, Nippert F, Davies MJ, Brandl C, Lösing R et al. Point Defect-Induced UV-C Absorption in Aluminum Nitride Epitaxial Layers Grown on Sapphire Substrates by Metal-Organic Chemical Vapor Deposition. Physica Status Solidi (B) Basic Research. 2020 Dez;257(12):2000278. doi: 10.1002/pssb.202000278
    Tuniz A, Bickerton O, Diaz FJ, Käsebier T, Kley EB, Kroker S et al. Modular nonlinear hybrid plasmonic circuit. Nature Communications. 2020 Dez 1;11(1):2413. doi: 10.1038/s41467-020-16190-z
    Weituschat LM, Dickmann W, Guimbao J, Ramos D, Kroker S, Postigo PA. Photonic and thermal modelling of microrings in silicon, diamond and GaN for temperature sensing. Nanomaterials. 2020 Mai;10(5):934. doi: 10.3390/nano10050934
    Zenin VA, Garcia-Ortiz CE, Evlyukhin AB, Yang Y, Malureanu R, Novikov SM et al. Engineering Nanoparticles with Pure High-Order Multipole Scattering. ACS PHOTONICS. 2020 Feb 28;7(4):1067-1075. doi: 10.1021/acsphotonics.0c00078
    Wasisto HS, Prades JD, Gülink J, Waag A. Beyond solid-state lighting: Miniaturization, hybrid integration, and applications of GaN nano-and micro-LEDs. Applied physics reviews. 2019 Dez;6(4). doi: 10.1063/1.5096322

TG Members

  • Involved Members and their Relevant Expertise
    Members Institution Relevant Expertise
    Jana Hartmann, Leader TUBS Structured Illumination at the Nanoscale; Epitaxy of III-nitride based LEDs and laser diodes; Design and fabrication of PICs
    Andreas Waag TUBS Coherent Light Field Control; Nanophotonics for Atom and Ion Manipulation; Hybrid integration of GaN LEDs with conductive substrates; Epitaxy of III-nitride based LEDs and laser diodes; Processing to nano- and µLEDs (arrays) and laser diodes; Design and fabrication of PICs; System integration like guiding of light on the chip, housing and software
    Stefanie Kroker PTB / TUBS Complex Coupled High Index Waveguide Arrays ; Photonic Nanomaterials in the Strong Optomechanical Coupling Regime; Theory and fabrication of metasurface mirrors; Characterisation of nano light sources; Simulation and design of PICs
    Markus Etzkorn TUBS Advancing TEM Characterization; Characterisation of nano light sources
    Boris Chichkov LUH Nanoscale Materials Processing; Processing to nano- and µLEDs (arrays) and laser diodes; Characterisation of nano light sources; Theory and fabrication of metasurface mirrors
    Tanja Mehlstäubler PTB Precision measurements; Integrated ion trap technology; Simulation and design of PICs
    Ernst M. Rasel LUH Quantum Gravimeters; Atom-Chip Based Gravimeters and Inertial Sensors
    Vadim Issakov TUBS Integrated Circuits; CMOS, Packaging of high frequency electronics;; Hybrid integration of Nitride based chips with CMOS microelectronics
    Stefan Wolter TUBS µLEDs, electro-optical characterisation
    Georg Jacob Schöttler TUBS µLEDs, Hybrid Integration
    Liam Shelling-Neto TUBS Deep Learning, Nanophotonic systems
    Silke Wolter TUBS Processing of optical components in the µm scale
    Anastasiia Sorokina TUBS Optical simulations, waveguides, light-outcoupling systems, optics for ion traps quantum computers
    Carl-Frederik Grimpe PTB Photonic Integrated Circuits
    Guochun Du PTB Photonic Integrated Circuits
    Markus Kromrey PTB Photonic Integrated Circuits
    Arstan Bisianov TUBS Design of optical components
    Frederik Lüssmann TUBS VCSEL development
    Robert Kraneis TUBS Neuromorphic computing
    Julian Kassmann TUBS DFB laser development
    Maximilian Müller TUBS Neuromorphic computing
    Maximilian Vergin TUBS Hybrid Integration for optical components
    Florian Meierhofer TUBS Hybrid Integration for optical components
    Steffen Sauer TUBS Photonic Integrated Circuits
    Vladislav Agluschewitsch TUBS Coherent Light Field Control
    Simon Spelthann LUH Nanoparticle Spectroscopy, Optical Fiber Technology
    Rany Miranti-Augustin TUBS Processing of µLEDs