Structured Illumination at the Nanoscale

Structured Illumination at the Nanoscale

Development of structured light illumination platforms using arrays of nano-/µLEDs or lasers and their system integration.

Contributions to QuantumFrontiers

  • Development of nanolight (e.g. µLEDs, laser diodes) for the control of electromagnetic fields at the nanoscale and demonstration of controlling light fields with a precision of 5 nm
  • Design and fabrication of vertical emitting lasers like VCSELs with advanced coherence control, particularly in the UV/blue spectral region 
  • Development of hybrid photonic-plasmonic waveguides for nanoscale light focusing as a potential platform for the manipulation of quantum systems
  • Integration of structured light illumination platforms into systems like a super-resolution microscope or atom and ion chip traps, whereby separately switchable nanoLEDs in an array allow control of the light at the nanoscale with a spatial precision below the wavelength of light and possibly even below the diffraction limit
  • Demonstrating proof-of-principle high-TRL systems based on µLED technology, which have high market potential and motivate spin-off companies

Collaborative Innovation

  • Simulation and fabrication of High Contrast Gratings for VCSELs (Kroker, Waag TU Braunschweig)
  • TEM characterisation of epitaxial material for nano light sources (Etzkorn, Waag TUBS)
  • Electron beam lithography for photonic crystals and high contrast gratings (Siegner PTB, Kroker, Waag TUBS)
  • Integration of µLED and laser arrays with CMOS to control large arrays with high density and small pixel sizes and pitches (Issakov, Waag TU Braunschweig)
  • Integration of laser diodes and integrated photonic circuits (PICs) for controlling light on a chip (Waag, Kroker TUBS, Mehlstäubler PTB)
  • Development of tunable and active metasurfaces for control of EM energy at the nanoscale (Kroker TUBS)
  • Laser printing of nanoparticles for the realization of novel micro-optomechanical devices (Chichkov LUH)

Scientific Output

  • Publications

    Manglano Clavero I, Margenfeld C, Hartmann J, Waag A. Facet Control and Material Redistribution in GaN Growth on Three-Dimensional Structures. Crystal Growth and Design. 2023 Jan 4;23(1):263-272.

    Bondza S, Lisdat C, Kroker S, Leopold T. Two-Color Grating Magneto-Optical Trap for Narrow-Line Laser Cooling. Physical review applied. 2022 Apr 1;17(4). 044002.

    Käseberg T, Grundmann J, Siefke T, Klapetek P, Valtr M, Kroker S et al. Mueller Matrix Ellipsometric Approach on the Imaging of Sub-Wavelength Nanostructures. Frontiers in Physics. 2022 Jan 21;9. 814559.

    Manglano Clavero I, Margenfeld C, Quatuor J, Spende H, Peters L, Schwarz UT et al. Gradients in Three-Dimensional Core–Shell GaN/InGaN Structures: Optimization and Physical Limitations. ACS Applied Materials Interfaces. 2022 Feb 23;14(7):9272–9280.

    Neto LS, Dickmann J, Kroker S. Deep learning assisted design of high reflectivity metamirrors. Optics express. 2022 Jan 3;30(2):986-994.

    Spende H, Margenfeld C, Waag A. AlGaN Microfins as Nonpolar UV Emitters Probed by Time-Resolved Cathodoluminescence. ACS PHOTONICS. 2022 Apr 13.

    Bornemann S, Gulink J, Moro V, Gil JC, Wolter S, Schottler G et al. Processing and characterization of monolithic passive-matrix GaN-based MicroLED arrays with pixel sizes from 5 to 50 μm. IEEE photonics journal. 2021 Aug 20;13(5). 8200209 .

    Chichkov NB, Evlyukhin AB, Chichkov BN. Massive surface-plasmon polaritons. Nanophotonics. 2021 Oct 2;10(14):3777-3778.

    Chichkov NB, Chichkov BN. On the origin of photon mass, momentum, and energy in a dielectric medium [Invited]. Optical materials express. 2021 Aug;11(8):2722-2729.

    Gulkin DN, Popkova AA, Afinogenov BI, Shilkin DA, Kuršelis K, Chichkov BN et al. Mie-driven directional nanocoupler for Bloch surface wave photonic platform. Nanophotonics. 2021 Sep;10(11):2939-2947.

    Wolter S, Spende H, Gülink J, Hartmann J, Wehmann HH, Waag A et al. Size-dependent electroluminescence and current-voltage measurements of blue ingan/gan µleds down to the submicron scale. Nanomaterials. 2021;11(4). 836.

    Yulianto N, Kadja GTM, Bornemann S, Gahlawat S, Majid N, Triyana K et al. Ultrashort Pulse Laser Lift-Off Processing of InGaN/GaN Light-Emitting Diode Chips. ACS Applied Electronic Materials. 2021 Feb 23;3(2):778-788.

    Yulianto N, Refino AD, Syring A, Majid N, Mariana S, Schnell P et al. Wafer-scale transfer route for top–down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique. Microsystems and Nanoengineering. 2021 Dec;7(1). 32.

    Bezshlyakh DD, Spende H, Weimann T, Hinze P, Bornemann S, Gülink J et al. Directly addressable GaN-based nano-LED arrays: fabrication and electro-optical characterization. Microsystems and Nanoengineering. 2020 Dec 1;6(1). 88.

    Evlyukhin AB, Tuz VR, Volkov VS, Chichkov BN. Bianisotropy for light trapping in all-dielectric metasurfaces. Physical Review B. 2020 May 13;101(20). 205415.

    Evlyukhin AB, Matiushechkina M, Zenin VA, Heurs M, Chichkov B. Lightweight metasurface mirror of silicon nanospheres [Invited]. Optical materials express. 2020 Sep 30;10(10):2706-2716.


    Kaseberg T, Siefke T, Kroker S, Bodermann B. Inverted plasmonic lens design for nanometrology applications. Measurement science and technology. 2020 Jul;31(7). 074013.

    Krieg L, Meierhofer F, Gorny S, Leis S, Splith D, Zhang Z et al. Toward three-dimensional hybrid inorganic/organic optoelectronics based on GaN/oCVD-PEDOT structures. Nature Communications. 2020 Dec 1;11(1). 5092.

    Siefke T, Hurtado CBR, Dickmann J, Dickmann W, Käseberg T, Meyer J et al. Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers. Optics express. 2020 Aug 3;28(16):23122-23132.

    Spende H, Margenfeld C, Meyer T, Clavero IM, Bremers H, Hangleiter A et al. Plasma profiling time-of-flight mass spectrometry for fast elemental analysis of semiconductor structures with depth resolution in the nanometer range. Semiconductor Science and Technology. 2020;35(3). 035006.

    Tillner N, Frankerl C, Nippert F, Davies MJ, Brandl C, Lösing R et al. Point Defect-Induced UV-C Absorption in Aluminum Nitride Epitaxial Layers Grown on Sapphire Substrates by Metal-Organic Chemical Vapor Deposition. Physica Status Solidi (B) Basic Research. 2020 Dec;257(12). 2000278.

    Tuniz A, Bickerton O, Diaz FJ, Käsebier T, Kley EB, Kroker S et al. Modular nonlinear hybrid plasmonic circuit. Nature Communications. 2020 Dec 1;11(1). 2413.

    Weituschat LM, Dickmann W, Guimbao J, Ramos D, Kroker S, Postigo PA. Photonic and thermal modelling of microrings in silicon, diamond and GaN for temperature sensing. Nanomaterials. 2020 May;10(5). 934.

    Zenin VA, Garcia-Ortiz CE, Evlyukhin AB, Yang Y, Malureanu R, Novikov SM et al. Engineering Nanoparticles with Pure High-Order Multipole Scattering. ACS PHOTONICS. 2020 Feb 28;7(4):1067-1075.

    Wasisto HS, Prades JD, Gülink J, Waag A. Beyond solid-state lighting: Miniaturization, hybrid integration, and applications of GaN nano-and micro-LEDs. Applied physics reviews. 2019 Dec 1;6(4). Y.

TG Members

  • Involved Members and their Relevant Expertise
    Members Institution Relevant Expertise
    Jana Hartmann, Leader TUBS Structured Illumination at the Nanoscale
    Andreas Waag TUBS Coherent Light Field Control; Nanophotonics for Atom and Ion Manipulation; Hybrid integration of GaN LEDs with conductive substrates
    Stefanie Kroker PTB / TUBS Complex Coupled High Index Waveguide Arrays ; Photonic Nanomaterials in the Strong Optomechanical Coupling Regime
    Markus Etzkorn TUBS Advancing TEM Characterization
    Boris Chichkov LUH Nanoscale Materials Processing
    Tanja Mehlstäubler PTB Precision measurements; Integrated ion trap technology
    Ernst M. Rasel LUH Quantum Gravimeters; Atom-Chip Based Gravimeters and Inertial Sensors
    Vadim Issakov TUBS Integrierte Schaltungen, CMOS, Hochfrequenzelektronik, Packaging
    Stefan Wolter TUBS µLEDs, electro-optical characterisation
    Georg Jacob Schöttler TUBS µLEDs, Hybrid Integration
    Liam Shelling-Neto TUBS Deep Learning, Nanophotonic systems
    Mayra Garcés-Schröder TUBS Processing of optical components in the µm scale
    Anastasiia Sorokina TUBS Optical simulations, waveguides, light-outcoupling systems, optics for ion traps quantum computers
    Carl-Frederik Grimpe PTB Photonic Integrated Circuits
    Guochun Du PTB Photonic Integrated Circuits
    Markus Kromrey PTB Photonic Integrated Circuits
    Arstan Bisianov TUBS Design of optical components
    Frederik Lüssmann TUBS VCSEL development
    Robert Kraneis TUBS Neuromorphic computing
    Julian Kassmann TUBS DFB laser development
    Maximilian Müller TUBS Neuromorphic computing
    Maximilian Vergin TUBS Hybrid Integration for optical components
    Florian Meierhofer TUBS Hybrid Integration for optical components
    Steffen Sauer TUBS Photonic Integrated Circuits
    Vladislav Agluschewitsch TUBS Coherent Light Field Control
    Simon Spelthann LUH Nanoparticle Spectroscopy, Optical Fiber Technology
    Pascal Gehrmann TUBS Photonic Integrated Circuits